Topology optimization in micromechanical resonator design
نویسندگان
چکیده
A topology optimization problem in micromechanical resonator design is addressed in this paper. The design goal is to control the first several eigenfrequencies of a micromechanical resonator using topology optimization. The design variable is the distribution of mass in a constrained domain which we model via (1) the Simple Isotropic Material with Penalization Model and (2) the Peak Function Model. The overall optimization problem is solved using the Method of Moving Asymptotes and a Genetic Algorithm combined with a local gradient method. A numerical example is presented to highlight the features of the methods in more detail. The advantages and disadvantages of each method are discussed.
منابع مشابه
Topology optimization in microelectromechanical resonator design
A topology optimization problem in microelectromechanical resonator design is addressed in this paper. The design goal is to control the first several eigen-frequencies of a microelectromechanical resonator using topology optimization in order to improve the resonator’s quality of resonance. The design variable is the distribution of mass in a constrained domain which we model via (1) the Simpl...
متن کاملIntegrated Micromechanical Resonant Sensors for Inertial Measurement Systems
Thumbnail-sized inertial measurement systems based on Micro Electro Mechanical Systems (MEMS) technology have been perceived as a breakthrough in the field of inertial navigation. However, even as micromechanical accelerometers have seen widespread commercialization, vibratory micromechanical gyroscopes have not enjoyed similar success. Previous approaches to high-performance micromechanical gy...
متن کاملNonlinear Modeling and Investigating the Nonlinear Effects on Frequency Response of Silicon Bulk-mode Ring Resonator
This paper presents a nonlinear analytical model for micromechanical silicon ring resonators with bulk-mode vibrations. A distributed element model has been developed to describe the dynamic behavior of the micromechanical ring resonator. This model shows the nonlinear effects in a silicon ring resonator focusing on the effect of large amplitudes around the resonance frequency, material and ele...
متن کاملDesign and Simulation of a Fluidic Micro-Bio-Sensor Based on Resonator Array
In this paper, a fluidic biosensor with possibility to fabricate by Micro-Electro-Mechanical Systems (MEMS) technology is proposed for biomedical mass detection and lab-on-chip applications. This is designed by electromechanical coupling of harmonic micromechanical resonators with harmonic springers as a mechanical resonator array. It can disperse mechanical wave along the array by electrostati...
متن کاملStability control of nonlinear micromechanical resonators under simultaneous primary and superharmonic resonances
Fast effects of a slow excitation on the main resonance of a nonlinear micromechanical resonator are analytically and experimentally investigated. We show, in particular, how the bifurcation topology of an undesirable unstable behavior is modified when the resonator is simultaneously actuated at its primary and superharmonic resonances. A stabilization mechanism is proposed and demonstrated by ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2016